Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573181 | Method of forming contact structures using nitrogen trifluoride preclean etch process and a titanium chemical vapor deposition step | Ramanujapuram A. Srinivas, Mohan K. Bhan | 2003-06-03 |