Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559039 | Doped silicon deposition process in resistively heated single wafer chamber | Shulin Wang, Lee Luo, Steven Chen, Errol Antonio C. Sanchez, Xianzhi Tao +1 more | 2003-05-06 |