Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566183 | Method of making a transistor, in particular spacers of the transistor | Steven Chen, Lee Luo, Tzy-Tzan Fu, Kuan-Ting Lin, Hung-Chuan Chen | 2003-05-20 |
| 6559074 | Method of forming a silicon nitride layer on a substrate | Steven Chen, Xianzhi Tao, Shulin Wang, Lee Luo, Sang-Hoon Ahn | 2003-05-06 |