Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660126 | Lid assembly for a processing system to facilitate sequential deposition techniques | Anh N. Nguyen, Michael Yang, Ming Xi, Anzhong Chang, Xiaoxiong Yuan +1 more | 2003-12-09 |
| 6551929 | Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques | Moris Kori, Alfred Mak, Jeong Soo Byun, Lawrence Chung-Lai Lei, Ashok Sinha +1 more | 2003-04-22 |