Issued Patents 2003
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555479 | Method for forming openings for conductive interconnects | Frederick N. Hause, Frank Mauersberger, Errol Todd Ryan, William S. Brennan, John A. Iacoponi +1 more | 2003-04-29 |
| 6545370 | Composite silicon nitride sidewall spacers for reduced nickel silicide bridging | Minh Van Ngo, Christy Mei-Chu Woo | 2003-04-08 |
| 6534869 | Method for reducing stress-induced voids for 0.25 &mgr;m micron and smaller semiconductor chip technology by annealing interconnect lines prior to ILD deposition and semiconductor chip made thereby | Bryan Tracy, Minh Van Ngo | 2003-03-18 |
| 6528362 | Metal gate with CVD amorphous silicon layer for CMOS devices and method of making with a replacement gate process | Qi Xiang, Matthew S. Buynoski | 2003-03-04 |
| 6518167 | Method of forming a metal or metal nitride interface layer between silicon nitride and copper | Lu You, Matthew S. Buynoski, Jeremias D. Romero, Pin-Chin Connie Wang, Minh Quoc Tran | 2003-02-11 |
| 6518154 | Method of forming semiconductor devices with differently composed metal-based gate electrodes | Matthew S. Buynoski, Qi Xiang | 2003-02-11 |
| 6518107 | Non-arsenic N-type dopant implantation for improved source/drain interfaces with nickel silicides | Matthew S. Buynoski, Qi Xiang | 2003-02-11 |
| 6514844 | Sidewall treatment for low dielectric constant (low K) materials by ion implantation | Jeremy I. Martin, Eric M. Apelgren, Christian Zistl, Srikantewara Dakshina-Murthy, Jonathan B. Smith +2 more | 2003-02-04 |
| 6514858 | Test structure for providing depth of polish feedback | Frederick N. Hause, Frank Mauersberger, Errol Todd Ryan, William S. Brennan, John A. Iacoponi +1 more | 2003-02-04 |
| 6511911 | Metal gate stack with etch stop layer | Srikanteswara Dakshina-Murthy | 2003-01-28 |
| 6511904 | Reverse mask and nitride layer deposition for reduction of vertical capacitance variation in multi-layer metallization systems | Susan H. Chen | 2003-01-28 |