Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518167 | Method of forming a metal or metal nitride interface layer between silicon nitride and copper | Lu You, Matthew S. Buynoski, Paul R. Besser, Pin-Chin Connie Wang, Minh Quoc Tran | 2003-02-11 |