Issued Patents 2003
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573480 | Use of thermal flow to remove side lobes | Ramkumar Subramanian, Michael K. Templeton | 2003-06-03 |
| 6572252 | System and method for illuminating a semiconductor processing system | Bhanwar Singh, Khoi A. Phan, Bryan K. Choo, Ramkumar Subramanian | 2003-06-03 |
| 6570157 | Multi-pitch and line calibration for mask and wafer CD-SEM system | Bhanwar Singh, Khoi A. Phan | 2003-05-27 |
| 6562185 | Wafer based temperature sensors for characterizing chemical mechanical polishing processes | Steven C. Avanzino, Bhanwar Singh, Ramkumar Subramanian | 2003-05-13 |
| 6562723 | Hybrid stack method for patterning source/drain areas | Jeffrey A. Shields, Ursula Q. Quinto | 2003-05-13 |
| 6561706 | Critical dimension monitoring from latent image | Bhanwar Singh, Michael K. Templeton, Ramkumar Subramanian | 2003-05-13 |
| 6559457 | System and method for facilitating detection of defects on a wafer | Khoi A. Phan, Bhanwar Singh | 2003-05-06 |
| 6556303 | Scattered signal collection using strobed technique | Michael K. Templeton, Bhanwar Singh, Khoi A. Phan | 2003-04-29 |
| 6552790 | System and method for facilitating wafer alignment by mitigating effects of reticle rotation on overlay | Michael K. Templeton | 2003-04-22 |
| 6551923 | Dual width contact for charge gain reduction | Jeffrey A. Shields | 2003-04-22 |
| 6545273 | Use of multiple tips on AFM to deconvolve tip effects | Bhanwar Singh, Sanjay K. Yedur | 2003-04-08 |
| 6541184 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bhanwar Singh, Michael K. Templeton, Sanjay K. Yedur | 2003-04-01 |
| 6537881 | Process for fabricating a non-volatile memory device | David K. Foote, Fei Wang, Steven K. Park | 2003-03-25 |
| 6537866 | Method of forming narrow insulating spacers for use in reducing minimum component size | Jeffrey A. Shields, Tuan Pham, Jusuke Ogura, Simon S. Chan | 2003-03-25 |
| 6533865 | Acoustic/ultrasonic agitation to reduce microbubbles in developer | Khoi A. Phan | 2003-03-18 |
| 6535288 | Machine readable code to trigger data collection | Michael K. Templeton, Bhanwar Singh, Khoi A. Phan | 2003-03-18 |
| 6534243 | Chemical feature doubling process | Michael K. Templeton, Ramkumar Subramanian, Kathleen R. Early, Ursula Q. Quinto | 2003-03-18 |
| 6528390 | Process for fabricating a non-volatile memory device | Hideki Komori, David K. Foote, Fei Wang | 2003-03-04 |
| 6524944 | Low k ILD process by removable ILD | Ramkumar Subramanian, Michael K. Templeton | 2003-02-25 |
| 6507474 | Using localized ionizer to reduce electrostatic charge from wafer and mask | Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bryan K. Choo | 2003-01-14 |