Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635874 | Self-cleaning technique for contamination on calibration sample in SEM | Bhanwar Singh, Michael K. Templeton, Sanjay K. Yedur | 2003-10-21 |
| 6634805 | Parallel plate development | Michael K. Templeton, Khoi A. Phan, Bharath Rangarajan, Ramkumar Subramanian | 2003-10-21 |
| 6632283 | System and method for illuminating a semiconductor processing system | Bhanwar Singh, Bharath Rangarajan, Khoi A. Phan, Ramkumar Subramanian | 2003-10-14 |
| 6591658 | Carbon nanotubes as linewidth standards for SEM & AFM | Sanjay K. Yedur, Bhanwar Singh, Michael K. Templeton, Ramkumar Subramanian | 2003-07-15 |
| 6572252 | System and method for illuminating a semiconductor processing system | Bharath Rangarajan, Bhanwar Singh, Khoi A. Phan, Ramkumar Subramanian | 2003-06-03 |
| 6566655 | Multi-beam SEM for sidewall imaging | Bhanwar Singh, Sanjay K. Yedur | 2003-05-20 |
| 6559446 | System and method for measuring dimensions of a feature having a re-entrant profile | Bhanwar Singh | 2003-05-06 |
| 6516528 | System and method to determine line edge roughness and/or linewidth | Bhanwar Singh | 2003-02-11 |
| 6507474 | Using localized ionizer to reduce electrostatic charge from wafer and mask | Bhanwar Singh, Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan | 2003-01-14 |