Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635874 | Self-cleaning technique for contamination on calibration sample in SEM | Bhanwar Singh, Michael K. Templeton, Bryan K. Choo | 2003-10-21 |
| 6605855 | CVD plasma process to fill contact hole in damascene process | Bhanwar Singh, Michael K. Templeton, Bharath Rangarajan, Christopher F. Lyons, Ramkumar Subramanian | 2003-08-12 |
| 6591658 | Carbon nanotubes as linewidth standards for SEM & AFM | Bhanwar Singh, Bryan K. Choo, Michael K. Templeton, Ramkumar Subramanian | 2003-07-15 |
| 6592932 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2003-07-15 |
| 6566655 | Multi-beam SEM for sidewall imaging | Bryan K. Choo, Bhanwar Singh | 2003-05-20 |
| 6545273 | Use of multiple tips on AFM to deconvolve tip effects | Bhanwar Singh, Bharath Rangarajan | 2003-04-08 |
| 6541184 | Nozzle arm movement for resist development | Ramkumar Subramanian, Khoi A. Phan, Bharath Rangarajan, Bhanwar Singh, Michael K. Templeton | 2003-04-01 |