Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6612319 | Low defect EBR nozzle | Bharath Rangarajan, Khoi A. Phan | 2003-09-02 |
| 6593210 | Self-aligned/maskless reverse etch process using an inorganic film | Bharath Rangarajan, Bhanwar Singh | 2003-07-15 |
| 6562723 | Hybrid stack method for patterning source/drain areas | Bharath Rangarajan, Jeffrey A. Shields | 2003-05-13 |
| 6534243 | Chemical feature doubling process | Michael K. Templeton, Ramkumar Subramanian, Bharath Rangarajan, Kathleen R. Early | 2003-03-18 |