Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9076914 | Techniques for processing a substrate | Kevin M. Daniels, Russell L. Low | 2015-07-07 |
| 9070535 | Proximity mask for ion implantation with improved resistance to thermal deformation | — | 2015-06-30 |
| 9006688 | Techniques for processing a substrate using a mask | Kevin M. Daniels, Russell J. Low | 2015-04-14 |
| 9000446 | Techniques for processing a substrate | Kevin M. Daniels, William T. Weaver, Steven M. Anella | 2015-04-07 |
| 8900982 | Techniques for processing a substrate | Kevin M. Daniels, Russell L. Low, Nicholas P. T. Bateman | 2014-12-02 |
| 8895325 | System and method for aligning substrates for multiple implants | John W. Graff, Nicholas P. T. Bateman | 2014-11-25 |
| 8765583 | Angled multi-step masking for patterned implantation | Nicholas P. T. Bateman, Atul Gupta | 2014-07-01 |
| 8768040 | Substrate identification and tracking through surface reflectance | Russell J. Low | 2014-07-01 |
| 8697559 | Use of ion beam tails to manufacture a workpiece | Nicholas P. T. Bateman, Peter Kurunczi, John W. Graff | 2014-04-15 |
| 8569157 | Stepped masking for patterned implantation | Nicholas P. T. Bateman, Charles T. Carlson | 2013-10-29 |
| 8465909 | Self-aligned masking for solar cell manufacture | Nicholas P. T. Bateman, Helen L. Maynard, Christopher R. Hatem, Deepak A. Ramappa | 2013-06-18 |
| 8461553 | Masked ion implant with fast-slow scan | Nicholas P. T. Bateman, Steven M. Anella, Atul Gupta | 2013-06-11 |
| 8455847 | Mask health monitor using a faraday probe | Nicholas P. T. Bateman, William T. Weaver, Russell J. Low | 2013-06-04 |
| 8377739 | Continuously optimized solar cell metallization design through feed-forward process | — | 2013-02-19 |
| 8378318 | Fixed mask design improvements | George M. Gammel | 2013-02-19 |
| 8372737 | Use of a shadow mask and a soft mask for aligned implants in solar cells | Nicholas P. T. Bateman, Atul Gupta | 2013-02-12 |
| 8216923 | Integrated shadow mask/carrier for patterned ion implantation | Nicholas P. T. Bateman, Kevin M. Daniels, Atul Gupta, Russell J. Low, Robert J. Mitchell +1 more | 2012-07-10 |
| 8173527 | Stepped masking for patterned implantation | Nicholas P. T. Bateman, Charles T. Carlson | 2012-05-08 |
| 8164068 | Mask health monitor using a faraday probe | Nicholas P. T. Bateman, William T. Weaver, Russell J. Low | 2012-04-24 |
| 8084293 | Continuously optimized solar cell metallization design through feed-forward process | Russell J. Low, Atul Gupta, William T. Weaver | 2011-12-27 |
| 8008176 | Masked ion implant with fast-slow scan | Nicholas P. T. Bateman, Steven M. Anella, Atul Gupta | 2011-08-30 |
| 7019315 | System and method for serial ion implanting productivity enhancements | Alan Sheng, Lawrence Ficarra | 2006-03-28 |
| 6995381 | System and method for multi-wafer scanning in ion implanters | Alan Sheng, Lawrence Ficarra | 2006-02-07 |