Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7019315 | System and method for serial ion implanting productivity enhancements | Alan Sheng, Benjamin B. Riordon | 2006-03-28 |
| 6995381 | System and method for multi-wafer scanning in ion implanters | Alan Sheng, Benjamin B. Riordon | 2006-02-07 |