Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6293850 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-09-25 |
| 6291111 | Method of trench polishing | Coming Chen, Jenn Tsao, Water Lur | 2001-09-18 |
| 6280079 | Method of mixing slurries | Ming-Sheng Yang, Peng-Yih Peng, Chia-Jui Chang | 2001-08-28 |
| 6271118 | Method of applying partial reverse mask | Water Lur | 2001-08-07 |
| 6261977 | Method for preventing an electrostatic chuck from being corroded during a cleaning process | Cheng-Yuan Tsai, Chih-Chien Liu | 2001-07-17 |
| 6255023 | Method of manufacturing binary phase shift mask | Chien-Chao Huang, Michael W C Huang | 2001-07-03 |
| 6246119 | Structure of a dual damascene | Water Lur | 2001-06-12 |
| 6242352 | Method of preventing micro-scratches on the surface of a semiconductor wafer when performing a CMP process | Chien-Hung Chen, Water Lu | 2001-06-05 |
| 6241582 | Chemical mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-06-05 |
| 6239018 | Method for forming dielectric layers | Chih-Chien Liu, Water Lur | 2001-05-29 |
| 6234876 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-05-22 |
| 6228209 | Equipment for forming a glue layer of an opening | Coming Chen, Water Lur | 2001-05-08 |
| 6221744 | Method for forming a gate | Hsueh-Hao Shih, Tri-Rung Yew | 2001-04-24 |
| 6214745 | Method of improving surface planarity of chemical-mechanical polishing operation by forming shallow dummy pattern | Ming-Sheng Yang, Yimin Huang, Water Lur | 2001-04-10 |
| 6207497 | Conformity of ultra-thin nitride deposition for DRAM capacitor | Kuo-Tai Huang | 2001-03-27 |
| 6203863 | Method of gap filling | Chih-Chien Liu, Water Lur, Shih-Wei Sun | 2001-03-20 |
| 6183350 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu +2 more | 2001-02-06 |
| 6180451 | Method of forming capacitor with a HSG layer | Wen-Yi Hsieh, Water Lur | 2001-01-30 |
| 6178543 | Method of designing active region pattern with shift dummy pattern | Coming Chen, Water Lur | 2001-01-23 |
| 6174793 | Method for enhancing adhesion between copper and silicon nitride | Cheng-Yuan Tsai, Chih-Chien Liu | 2001-01-16 |
| 6171899 | Method for fabricating a capacitor | Fu-Tai Liou, Water Lur, Kuan-Cheng Su | 2001-01-09 |
| 6169012 | Chemical mechanical polishing for forming a shallow trench isolation structure | Coming Chen, Water Lur | 2001-01-02 |
| 6156642 | Method of fabricating a dual damascene structure in an integrated circuit | Water Lur | 2000-12-05 |
| 6155912 | Cleaning solution for cleaning a polishing pad used in a chemical-mechanical polishing process | Hsueh-Chung Chen, Ming-Sheng Yang | 2000-12-05 |
| 6146974 | Method of fabricating shallow trench isolation (STI) | Chih-Chien Liu, Cheng-Yuan Tsai, Gwo-Shii Yang | 2000-11-14 |