| 6721628 |
Closed loop concentration control system for chemical mechanical polishing slurry |
Chien-Hsin Lai, Huang-Yi Li, Kevin Yu |
2004-04-13 |
| 6569771 |
Carrier head for chemical mechanical polishing |
Tzu-Shin Chen, Chien-Hsin Lai, Yung-Tsung Wei |
2003-05-27 |
| 6352244 |
Auxiliary gasline-heating unit in chemical vapor deposition |
Chien-Hsin Lai, Peng-Yih Peng, Fu-Yang Yu |
2002-03-05 |
| 6341995 |
Chemical mechanical polishing apparatus |
Chien-Hsin Lai, Jung-Nan Tseng, Huang-Yi Lin, Kevin Yu |
2002-01-29 |
| 6322057 |
Auxiliary gasline-heating unit in chemical vapor deposition |
Chien-Hsin Lai, Peng-Yih Peng, Fu-Yang Yu |
2001-11-27 |
| 6293850 |
Chemical-mechanical polish machines and fabrication process using the same |
Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-09-25 |
| 6241582 |
Chemical mechanical polish machines and fabrication process using the same |
Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-06-05 |
| 6234876 |
Chemical-mechanical polish machines and fabrication process using the same |
Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-05-22 |
| 6228420 |
Method to maintain consistent thickness of thin film deposited by chemical vapor deposition |
Chien-Hsin Lai, Hao-Kuang Chiu, Fu-Yang Yu |
2001-05-08 |
| 6220930 |
Wafer polishing head |
Chien-Hsin Lai, Peng-Yih Peng, Chia-Jui Chang |
2001-04-24 |
| 6206758 |
Method for increasing working life of retaining ring in chemical-mechanical polishing machine |
Chien-Hsin Lai, Peng-Yih Peng |
2001-03-27 |
| 6183350 |
Chemical-mechanical polish machines and fabrication process using the same |
Chien-Hsin Lai, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more |
2001-02-06 |
| 6120366 |
Chemical-mechanical polishing pad |
Chien-Hsin Lai, Peng-Yih Peng, Edward S. Yang, Kun-Lin Wu, Fu-Yang Yu |
2000-09-19 |
| 6119294 |
Cleaning system with automatically controlled brush pressure |
Chien-Hsin Lai, Kun-Lin Wu, Peng-Yih Peng |
2000-09-19 |
| 6096162 |
Chemical mechanical polishing machine |
Chien-Hsin Lai, Peng-Yih Peng, Chia-Jui Chang |
2000-08-01 |
| 6062963 |
Retainer ring design for polishing head of chemical-mechanical polishing machine |
Chien-Hsin Lai, Peng-Yih Peng, Hao-Kuang Chiu, Kun-Lin Wu |
2000-05-16 |
| 6051139 |
Device for filtering slurry |
Chien-Hsin Lai, Peng-Yih Peng |
2000-04-18 |