Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10872873 | Method for bonding wafers and bonding tool | Chien-Chih Chen, Tsung-Yi Yang, Chung-I Hung, Mu-Han Cheng, Su-Yu Yeh | 2020-12-22 |
| 10792783 | System, control method and apparatus for chemical mechanical polishing | Hsiang-Chu Hu, Chun-Hai Huang, Mu-Han Cheng, Yu-Chin Tseng, Chien-Chih Chen | 2020-10-06 |
| 10050159 | Lens structure | Chien-Chih Chen, Su-Yu Yeh, Mu-Han Cheng, Chun-Hai Huang | 2018-08-14 |
| 7070490 | Vacuum suction membrane for holding silicon wafer | Ming-Hsing Kao, Wen-Chin Lin, Hua-Bin Chi | 2006-07-04 |
| 6755726 | Polishing head with a floating knife-edge | Ming-Hsing Kao, Chin-Kun Lin, Wen-Chin Lin | 2004-06-29 |
| 6569771 | Carrier head for chemical mechanical polishing | Juen-Kuen Lin, Chien-Hsin Lai, Yung-Tsung Wei | 2003-05-27 |