Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8105648 | Method for operating a chemical deposition chamber | Tzu-Chin Tseng, Ying-Yi Chang | 2012-01-31 |
| 7569111 | Method of cleaning deposition chamber | Chun-Yi Wang | 2009-08-04 |
| 7264676 | Plasma apparatus and method capable of adaptive impedance matching | San-An Lin, Kuo-En Yen, Kuo-Uei Huang | 2007-09-04 |
| 6721628 | Closed loop concentration control system for chemical mechanical polishing slurry | Juen-Kuen Lin, Huang-Yi Li, Kevin Yu | 2004-04-13 |
| 6682399 | Pressure monitoring system for chemical-mechanical polishing | Jung-Nan Tseng, Huang-Yi Lin, Kevin Yu | 2004-01-27 |
| 6676801 | Pressure suppression device for chemical mechanical polishing machine and method thereof | Jung-Nan Tseng, Huang-Yi Lin, Fu-Yang Yu | 2004-01-13 |
| 6648729 | Wafer pressure regulation system for polishing machine | Cheng-Chi Hsieh, Jung-Nan Tseng, Huang-Yi Lin, Fu-Yang Yu | 2003-11-18 |
| 6569771 | Carrier head for chemical mechanical polishing | Juen-Kuen Lin, Tzu-Shin Chen, Yung-Tsung Wei | 2003-05-27 |
| 6416615 | Device for detecting abnormality in chemical-mechanical polishing operation | Hui-Shen Shih, Jung-Nan Tseng, Huang-Yi Lin | 2002-07-09 |
| 6352244 | Auxiliary gasline-heating unit in chemical vapor deposition | Juen-Kuen Lin, Peng-Yih Peng, Fu-Yang Yu | 2002-03-05 |
| 6341995 | Chemical mechanical polishing apparatus | Juen-Kuen Lin, Jung-Nan Tseng, Huang-Yi Lin, Kevin Yu | 2002-01-29 |
| 6322057 | Auxiliary gasline-heating unit in chemical vapor deposition | Juen-Kuen Lin, Peng-Yih Peng, Fu-Yang Yu | 2001-11-27 |
| 6307163 | Chemical mixer tank calibrator and calibrating method for the same | Fu-Yang Yu | 2001-10-23 |
| 6293850 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more | 2001-09-25 |
| 6267654 | Pad backer for polishing head of chemical mechanical polishing machine | Jung-Nan Tseng, Huang-Yi Lin, Hui-Shen Shih | 2001-07-31 |
| 6241582 | Chemical mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more | 2001-06-05 |
| 6234876 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more | 2001-05-22 |
| 6228420 | Method to maintain consistent thickness of thin film deposited by chemical vapor deposition | Juen-Kuen Lin, Hao-Kuang Chiu, Fu-Yang Yu | 2001-05-08 |
| 6220930 | Wafer polishing head | Juen-Kuen Lin, Peng-Yih Peng, Chia-Jui Chang | 2001-04-24 |
| 6206758 | Method for increasing working life of retaining ring in chemical-mechanical polishing machine | Juen-Kuen Lin, Peng-Yih Peng | 2001-03-27 |
| 6183350 | Chemical-mechanical polish machines and fabrication process using the same | Juen-Kuen Lin, Peng-Yih Peng, Kun-Lin Wu, Daniel T. Chiu, Chih-Chiang Yang +2 more | 2001-02-06 |
| 6165255 | Chemical-liquid controlling apparatus | Peng-Yih Peng, Li-Min Chang, Fu-Yang Yu | 2000-12-26 |
| 6129043 | Gas tube with heating apparatus | Fu-Yang Yu | 2000-10-10 |
| 6119294 | Cleaning system with automatically controlled brush pressure | Juen-Kuen Lin, Kun-Lin Wu, Peng-Yih Peng | 2000-09-19 |
| 6120366 | Chemical-mechanical polishing pad | Juen-Kuen Lin, Peng-Yih Peng, Edward S. Yang, Kun-Lin Wu, Fu-Yang Yu | 2000-09-19 |