Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564507 | Interlayer dielectric layer with two tensile dielectric layers | Yu-Cheng Lin | 2017-02-07 |
| 9281238 | Method for fabricating interlayer dielectric layer | Yu-Cheng Lin | 2016-03-08 |
| 8674463 | Multifunction MEMS element and integrated method for making MOS and multifunction MEMS | — | 2014-03-18 |
| 8492857 | MEMS diaphragm | Yu-Fang Chien | 2013-07-23 |
| 8431473 | Method for fabricating semiconductor device | Shu-Hui Hu, Shih-Feng Su, Chih-Chien Liu, Po-Chun Chen, Ya-Jyuan Hung +2 more | 2013-04-30 |
| 8390085 | MEMS diaphragm | Yu-Fang Chien | 2013-03-05 |
| 8142258 | Method of transferring a wafer | Kuo-Wei Yang, Chih-Jen Mao, Cho-Long Lin | 2012-03-27 |
| 8134192 | Integrated structure of MEMS device and CMOS image sensor device | — | 2012-03-13 |
| 8134215 | MEMS diaphragm | Yu-Fang Chien | 2012-03-13 |
| 8101987 | Semiconductor device and method of fabricating the same | — | 2012-01-24 |
| 8072036 | Micro-electromechanical system microphone structure | — | 2011-12-06 |
| 8071412 | Method of fabricating micro-electromechanical system microphone structure | — | 2011-12-06 |
| 8035191 | Contact efuse structure | Yung-Chang Lin, Kuei-Sheng Wu, San-Fu Lin | 2011-10-11 |
| 7967960 | Fluid-confining apparatus | Yu-Fang Chien | 2011-06-28 |
| 7957827 | Method of controlling statuses of wafers | Yu-Fang Chien | 2011-06-07 |
| 7909677 | Method of transferring a wafer | Kuo-Wei Yang, Chih-Jen Mao, Cho-Long Lin | 2011-03-22 |
| 7851247 | Method of fabricating micro-electromechanical system microphone structure | — | 2010-12-14 |
| 7833818 | Integrated structure of MEMS device and CMOS image sensor device and fabricating method thereof | — | 2010-11-16 |
| 7828625 | Method of supplying polishing liquid | Chi-Min Yu, Chi-Chih Chuang | 2010-11-09 |
| 7795056 | Semiconductor device and method of fabricating the same | — | 2010-09-14 |
| 7732009 | Method of cleaning reaction chamber, method of forming protection film and protection wafer | Chih-Jen Mao, Chun-Hung Hsia, Ta-Ching Yang, Chun-Cheng Yu, Chien-Fu Chu +2 more | 2010-06-08 |
| 7732332 | Chemical mechanical polishing method with inspection pre and post processing | — | 2010-06-08 |
| 7731572 | CMP head | Chi-Min Yu, Chi-Chih Chuang, Yu-Fang Chien | 2010-06-08 |
| 7662645 | Reworked integrated circuit device and reworking method thereof | — | 2010-02-16 |
| 7557025 | Method of etching a dielectric layer to form a contact hole and a via hole and damascene method | — | 2009-07-07 |