Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8492857 | MEMS diaphragm | Hui-Shen Shih | 2013-07-23 |
| 8390085 | MEMS diaphragm | Hui-Shen Shih | 2013-03-05 |
| 8134215 | MEMS diaphragm | Hui-Shen Shih | 2012-03-13 |
| 7967960 | Fluid-confining apparatus | Hui-Shen Shih | 2011-06-28 |
| 7957827 | Method of controlling statuses of wafers | Hui-Shen Shih | 2011-06-07 |
| 7872852 | Conductive structure having capacitor | Tsuoe-Hsiang Liao, Huo-Tieh Lu, Chih-Chien Liu, Hsiang-Hung Peng | 2011-01-18 |
| 7731572 | CMP head | Chi-Min Yu, Chi-Chih Chuang, Hui-Shen Shih | 2010-06-08 |