Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7070490 | Vacuum suction membrane for holding silicon wafer | Tzu-Shin Chen, Wen-Chin Lin, Hua-Bin Chi | 2006-07-04 |
| 7052376 | Wafer carrier gap washer | Ching-Wen Teng, Chin-Kun Lin, Wee-Shiong Tan | 2006-05-30 |
| 7004820 | CMP method and device capable of avoiding slurry residues | Ching-Wen Teng, Chin-Kun Lin, Er-Yang Chua, Lee-Lee Lau | 2006-02-28 |
| 6755726 | Polishing head with a floating knife-edge | Tzu-Shin Chen, Chin-Kun Lin, Wen-Chin Lin | 2004-06-29 |