Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427548 | Cleaning process of wafer polishing pad and cleaning nozzle | Shih-Jie Lin, Kuo-Liang Huang, Wen Yi Tan | 2025-09-30 |
| 7432205 | Method for controlling polishing process | Chin-Kun Lin, Boon-Tiong Neo | 2008-10-07 |
| 7052376 | Wafer carrier gap washer | Ming-Hsing Kao, Chin-Kun Lin, Wee-Shiong Tan | 2006-05-30 |
| 7004820 | CMP method and device capable of avoiding slurry residues | Ming-Hsing Kao, Chin-Kun Lin, Er-Yang Chua, Lee-Lee Lau | 2006-02-28 |