Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7612000 | Modacrylic shrinkable fiber and method for manufacturing the same | Sohei Nishida, Toshiaki Ebisu | 2009-11-03 |
| 7601402 | Method for forming insulation film and apparatus for forming insulation film | Yusaku Kashiwagi, Yoshihisa Kagawa, Gishi Chung | 2009-10-13 |
| 7307019 | Method for supercritical carbon dioxide processing of fluoro-carbon films | Akira Asano, Koutarou Miyatani, Joseph T. Hillman, Bentley J. Palmer | 2007-12-11 |
| 7186806 | Process for producing regenerated collagen fiber and process for setting the same | Takashi Ueda, Takeshi Chiba | 2007-03-06 |
| 6949829 | Semiconductor device and fabrication method therefor | Takashi Akahori, Gishi Chung | 2005-09-27 |
| 6311908 | Crushing method for waste containing materials unfit for crushing and apparatus for its practice | Takao Kajiyama, Ryozou Kushida, Hiroshi Arito | 2001-11-06 |
| 6155200 | ECR plasma generator and an ECR system using the generator | Yasuhiro Horiike | 2000-12-05 |
| 5958258 | Plasma processing method in semiconductor processing system | Hiroyuki Ishihara | 1999-09-28 |
| 5531834 | Plasma film forming method and apparatus and plasma processing apparatus | Shuichi Ishizuka, Jiro Hata, Akira Suzuki | 1996-07-02 |
| 5522934 | Plasma processing apparatus using vertical gas inlets one on top of another | Akira Suzuki, Shuichi Ishizuka, Jiro Hata | 1996-06-04 |
| 5476182 | Etching apparatus and method therefor | Shuichi Ishizuka, Jiro Hata | 1995-12-19 |
| 5308791 | Method and apparatus for processing surface of semiconductor layer | Yasuhiro Horiike | 1994-05-03 |
| 5290609 | Method of forming dielectric film for semiconductor devices | Yasuhiro Horiike | 1994-03-01 |
| 5252892 | Plasma processing apparatus | Akira Koshiishi, Masahiko Matsudo, Naoki Takayama | 1993-10-12 |
| 5101110 | Ion generator | Masahiko Matsudo, Akira Koshiishi, Naoki Takayama | 1992-03-31 |
| 5089747 | Electron beam excitation ion source | Akira Koshiishi, Naoki Takayama | 1992-02-18 |
| 5083061 | Electron beam excited ion source | Akira Koshiishi | 1992-01-21 |
| 5028791 | Electron beam excitation ion source | Akira Koshiishi, Masahiko Matsudo, Naoki Takayama | 1991-07-02 |
| 4749912 | Ion-producing apparatus | Tamio Hara, Manabu Hamagaki, Yoshinobu Aoyagi, Susumu Namba, Nobuo Ishii +1 more | 1988-06-07 |