Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6878639 | Borderless interconnection process | Ru-Chian Chiang, Hun-Jan Tao | 2005-04-12 |
| 6867084 | Gate structure and method of forming the gate dielectric with mini-spacer | Yuan-Hung Chiu, Fang Chen, Hun-Jan Tao | 2005-03-15 |
| 6838381 | Methods for improving sheet resistance of silicide layer after removal of etch stop layer | Peng-Fu Hsu, Baw-Ching Perng, Ju-Wang Hsu, Yaun-Hung Chiu | 2005-01-04 |
| 6828205 | Method using wet etching to trim a critical dimension | Ming-Jie Huang, Huan-Just Lin, Hun-Jan Tao | 2004-12-07 |
| 6787455 | Bi-layer photoresist method for forming high resolution semiconductor features | Hun-Jan Tao, Ju-Wang Hsu, Cheng-Ku Chen | 2004-09-07 |
| 6780782 | Bi-level resist structure and fabrication method for contact holes on semiconductor substrates | Hun-Jan Tao, Tsang-Jiuh Wu, Ju-Wang Hsu | 2004-08-24 |
| 6764911 | Multiple etch method for fabricating spacer layers | Jw-Wang Hsu, Mei-Ru Kuo, Baw-Ching Peng, Hun-Jan Tao | 2004-07-20 |
| 6720132 | Bi-layer photoresist dry development and reactive ion etch method | Hun-Jan Tao | 2004-04-13 |
| 6706640 | Metal silicide etch resistant plasma etch method | Ju-Wang Hsu, Peng-Fu Hsu, Hun-Jan Tao | 2004-03-16 |
| 6630398 | Borderless contact with buffer layer | Jyh-Huei Chen, Chu-Yun Fu, Hun-Jan Tao | 2003-10-07 |
| 6444566 | Method of making borderless contact having a sion buffer layer | Jyh-Huei Chen, Chu-Yun Fu, Hun-Jan Tao | 2002-09-03 |
| 6436841 | Selectivity oxide-to-oxynitride etch process using a fluorine containing gas, an inert gas and a weak oxidant | Bao-Ching Pen, Mei-Ru Kuo, Hun-Jan Tao | 2002-08-20 |
| 6410424 | Process flow to optimize profile of ultra small size photo resist free contact | Chung-Long Chang, Chii-Ming Wu, Hun-Jan Tao | 2002-06-25 |
| 6407002 | Partial resist free approach in contact etch to improve W-filling | Li-Te Lin, Yuan-Hung Chiu, Hun-Jan Tao | 2002-06-18 |
| 6399437 | Enhanced side-wall stacked capacitor | Yung-Yi Hsu, Yi Yi, Chia-Shun Hsiao | 2002-06-04 |
| 6368974 | Shrinking equal effect critical dimension of mask by in situ polymer deposition and etching | Chan-Lon Yang | 2002-04-09 |
| 6251791 | Eliminating etching microloading effect by in situ deposition and etching | Chan-Lon Yang | 2001-06-26 |
| 5824234 | Method for forming low contact resistance bonding pad | Chon-Shin Jou, Ting-Sing Wang, Chun-Lin Chen, Ming-Ru Tsai | 1998-10-20 |