Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6764911 | Multiple etch method for fabricating spacer layers | Jw-Wang Hsu, Ming-Huan Tsai, Baw-Ching Peng, Hun-Jan Tao | 2004-07-20 |
| 6440875 | Masking layer method for forming a spacer layer with enhanced linewidth control | Bor-Wen Chan | 2002-08-27 |
| 6436841 | Selectivity oxide-to-oxynitride etch process using a fluorine containing gas, an inert gas and a weak oxidant | Ming-Huan Tsai, Bao-Ching Pen, Hun-Jan Tao | 2002-08-20 |