CF

Chu-Yun Fu

TSMC: 46 patents #715 of 12,232Top 6%
Overall (All Time): #63,224 of 4,157,543Top 2%
46
Patents All Time

Issued Patents All Time

Showing 26–46 of 46 patents

Patent #TitleCo-InventorsDate
6497993 In situ dry etching procedure to form a borderless contact hole Yuan-Hunh Chiu, Hun-Jan Tao, Chia-Shiung Tsai 2002-12-24
6479385 Interlevel dielectric composite layer for insulation of polysilicon and metal structures Syun-Ming Jang 2002-11-12
6461966 Method of high density plasma phosphosilicate glass process on pre-metal dielectric application for plasma damage reducing and throughput improvement Yao-Hsiang Chen, Syung-Ming Jang 2002-10-08
6444566 Method of making borderless contact having a sion buffer layer Ming-Huan Tsai, Jyh-Huei Chen, Hun-Jan Tao 2002-09-03
6426272 Method to reduce STI HDP-CVD USG deposition induced defects Li-Jen Chen 2002-07-30
6423653 Reduction of plasma damage for HDP-CVD PSG process Syun-Ming Jang 2002-07-23
6372664 Crack resistant multi-layer dielectric layer and method for formation thereof Syun-Ming Jang, Chen-Hua Yu 2002-04-16
6365523 Integrated high density plasma chemical vapor deposition (HDP-CVD) method and chemical mechanical polish (CMP) planarizing method for forming patterned planarized aperture fill layers Syun-Ming Jang, Ying-Ho Chen 2002-04-02
6316348 High selectivity Si-rich SiON etch-stop layer Chia-Shiung Tsai, Syun-Ming Jang 2001-11-13
6274514 HDP-CVD method for forming passivation layers with enhanced adhesion Syun-Ming Jang 2001-08-14
6261957 Self-planarized gap-filling by HDPCVD for shallow trench isolation Syun-Ming Jang 2001-07-17
6245669 High selectivity Si-rich SiON etch-stop layer Chia-Shiung Tsai, Syun-Ming Jang 2001-06-12
6245682 Removal of SiON ARC film after poly photo and etch Syun-Ming Jang 2001-06-12
6228780 Non-shrinkable passivation scheme for metal em improvement So Wein Kuo, Syun-Ming Jang, Ruey-Lian Hwang 2001-05-08
6214698 Shallow trench isolation methods employing gap filling doped silicon oxide dielectric layer Jhon Jhy Liaw, Jin-Yuan Lee, Kuei-Ying Lee, Kong-Beng Thei 2001-04-10
6207483 Method for smoothing polysilicon gate structures in CMOS devices Chung-Long Chang, Syun-Ming Jang, Shwangming Jeng 2001-03-27
6174808 Intermetal dielectric using HDP-CVD oxide and SACVD O3-TEOS Syun-Ming Jang 2001-01-16
6174818 Method of patterning narrow gate electrode Hun-Jan Tao, Huan-Just Lin, Hung-Chang Hsieh, Ying-Ying Wang, Chia-Shiung Tsai +1 more 2001-01-16
6090714 Chemical mechanical polish (CMP) planarizing trench fill method employing composite trench fill layer Syun-Ming Jang 2000-07-18
6063711 High selectivity etching stop layer for damascene process Li-Chih Chao, Chia-Shiung Tsai, Jhon Jhy Liaw 2000-05-16
6037018 Shallow trench isolation filled by high density plasma chemical vapor deposition Syun-Ming Jang, Chen-Hua Yu 2000-03-14