Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9234278 | CVD conformal vacuum/pumping guiding design | You-Hua Chou, Chia-Ho Chen, Chin-Hsiang Lin | 2016-01-12 |
| 9218998 | Electrostatic chuck with multi-zone control | Chia-Ho Chen, Ming Huei Lien, Shu-Fen Wu, You-Hua Chou | 2015-12-22 |
| 9214514 | Mechanisms for forming semiconductor device having stable dislocation profile | Min Hao Hong, Shiu-Ko JangJian, Miao-Cheng Liao | 2015-12-15 |
| 9006070 | Two-step shallow trench isolation (STI) process | Min Hao Hong, You-Hua Chou, Shiu-Ko JangJian, Miao-Cheng Liao, Hsiang Hsiang Ko +1 more | 2015-04-14 |
| 8953298 | Electrostatic chuck robotic system | Chung-En Kao, You-Hua Chou, Ming-Shiou Kuo | 2015-02-10 |
| 8916480 | Chemical vapor deposition film profile uniformity control | Ming-Shiou Kuo, You-Hua Chou, Ming-Chin Tsai, Chia-Ho Chen, Chin-Hsiang Lin | 2014-12-23 |
| 8902561 | Electrostatic chuck with multi-zone control | Chia-Ho Chen, Ming Huei Lien, Shu-Fen Wu, You-Hua Chou | 2014-12-02 |
| 8796105 | Method and apparatus for preparing polysilazane on a semiconductor wafer | You-Hua Chou, Min Hao Hong, Ming Huei Lien, Chih-Jen Wu, Chen-Ming Huang | 2014-08-05 |
| 8692299 | Two-step shallow trench isolation (STI) process | Min Hao Hong, You-Hua Chou, Shiu-Ko JangJian, Miao-Cheng Liao, Hsiang Hsiang Ko +1 more | 2014-04-08 |
| 8624394 | Integrated technology for partial air gap low K deposition | Hung Jui Chang, You-Hua Chou, Shiu-Ko Jang Jian, Ming-Shiou Kuo | 2014-01-07 |
| 7432192 | Post ECP multi-step anneal/H2 treatment to reduce film impurity | Hsien-Ping Feng, Jung-Chih Tsao, Hsi-Kuei Cheng, Ming-Yuan Cheng, Steven Lin +2 more | 2008-10-07 |
| 7030016 | Post ECP multi-step anneal/H2 treatment to reduce film impurity | Hsien-Ping Feng, Jung-Chih Tsao, Hsi-Kuei Cheng, Ming-Yuan Cheng, Steven Lin +2 more | 2006-04-18 |
| 5965671 | Modified phenolic resin toughened by poly (alkylene oxide) and preparation thereof | Chen-Chi Martin Ma, Hew-Der Wu | 1999-10-12 |