Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11154908 | Separating apparatus for polysilicon | Simon Ehrenschwendtner, Thomas Hinterberger, Hans-Guenther Wackerbauer | 2021-10-26 |
| 11059072 | Screen plate for screening plants for mechanical classification of polysilicon | Andreas Bergmann, Simon Ehrenschwendtner, Christian Fraunhofer | 2021-07-13 |
| 9230794 | Process for cleaning, drying and hydrophilizing a semiconductor wafer | Guenter Schwab, Clemens Zapilko, Diego Feijoo | 2016-01-05 |
| 8721390 | Method for the double-side polishing of a semiconductor wafer | Juergen Schwandner, Roland Koppert | 2014-05-13 |
| 8685270 | Method for producing a semiconductor wafer | Juergen Schwandner, Diego Feijoo, Michael Kerstan, Georg Pietsch, Guenter Schwab | 2014-04-01 |
| 8647173 | Method for polishing a semiconductor wafer | Juergen Schwandner, Roland Koppert | 2014-02-11 |
| 8647985 | Method for polishing a substrate composed of semiconductor material | Juergen Schwandner, Roland Koppert, Georg Pietsch | 2014-02-11 |
| 8580046 | Method for the treatment of a semiconductor wafer | Guenter Schwab, Diego Feijoo, Hans-Joachim Luthe, Franz Sollinger | 2013-11-12 |
| 8372213 | Method for the treatment of a semiconductor wafer | Guenter Schwab, Diego Feijoo, Hans-Joachim Luthe, Franz Sollinger | 2013-02-12 |
| 8093143 | Method for producing a wafer comprising a silicon single crystal substrate having a front and a back side and a layer of SiGe deposited on the front side | Peter Storck | 2012-01-10 |
| 8070882 | Method for the wet-chemical treatment of a semiconductor wafer | Guenter Schwab, Clemens Zapilko, Diego Feijoo, Teruo Haibara, Yoshihiro Mori | 2011-12-06 |
| 7938911 | Process for cleaning a semiconductor wafer using a cleaning solution | Clemens Zapilko, Diego Feijoo, Guenter Schwab | 2011-05-10 |
| 7541287 | Method for machining a semiconductor wafer on both sides in a carrier, carrier, and a semiconductor wafer produced by the method | Ruediger Schmolke, Gerhard Heier, Guido Wenski | 2009-06-02 |
| 7538008 | Method for producing a layer structure | Diego Feijoo, Guenter Schwab | 2009-05-26 |
| 6530826 | Process for the surface polishing of silicon wafers | Guido Wenski, Heinrich Hennhofer, Bruno Lichtenegger | 2003-03-11 |
| 6095898 | Process and device for polishing semiconductor wafers | Heinrich Hennhofer, Hans Kramer, Helmut Kirschner, Manfred Thurner, Klaus Rottger | 2000-08-01 |
| 5980361 | Method and device for polishing semiconductor wafers | Paul Muller, Heinrich Hennhofer, Norbert Sickmann, Rainer Neumann, Franz Mangs +2 more | 1999-11-09 |