| 11154908 |
Separating apparatus for polysilicon |
Simon Ehrenschwendtner, Thomas Hinterberger, Hans-Guenther Wackerbauer |
2021-10-26 |
| 11059072 |
Screen plate for screening plants for mechanical classification of polysilicon |
Andreas Bergmann, Simon Ehrenschwendtner, Christian Fraunhofer |
2021-07-13 |
| 9230794 |
Process for cleaning, drying and hydrophilizing a semiconductor wafer |
Guenter Schwab, Clemens Zapilko, Diego Feijoo |
2016-01-05 |
| 8721390 |
Method for the double-side polishing of a semiconductor wafer |
Juergen Schwandner, Roland Koppert |
2014-05-13 |
| 8685270 |
Method for producing a semiconductor wafer |
Juergen Schwandner, Diego Feijoo, Michael Kerstan, Georg Pietsch, Guenter Schwab |
2014-04-01 |
| 8647173 |
Method for polishing a semiconductor wafer |
Juergen Schwandner, Roland Koppert |
2014-02-11 |
| 8647985 |
Method for polishing a substrate composed of semiconductor material |
Juergen Schwandner, Roland Koppert, Georg Pietsch |
2014-02-11 |
| 8580046 |
Method for the treatment of a semiconductor wafer |
Guenter Schwab, Diego Feijoo, Hans-Joachim Luthe, Franz Sollinger |
2013-11-12 |
| 8372213 |
Method for the treatment of a semiconductor wafer |
Guenter Schwab, Diego Feijoo, Hans-Joachim Luthe, Franz Sollinger |
2013-02-12 |
| 8093143 |
Method for producing a wafer comprising a silicon single crystal substrate having a front and a back side and a layer of SiGe deposited on the front side |
Peter Storck |
2012-01-10 |
| 8070882 |
Method for the wet-chemical treatment of a semiconductor wafer |
Guenter Schwab, Clemens Zapilko, Diego Feijoo, Teruo Haibara, Yoshihiro Mori |
2011-12-06 |
| 7938911 |
Process for cleaning a semiconductor wafer using a cleaning solution |
Clemens Zapilko, Diego Feijoo, Guenter Schwab |
2011-05-10 |
| 7541287 |
Method for machining a semiconductor wafer on both sides in a carrier, carrier, and a semiconductor wafer produced by the method |
Ruediger Schmolke, Gerhard Heier, Guido Wenski |
2009-06-02 |
| 7538008 |
Method for producing a layer structure |
Diego Feijoo, Guenter Schwab |
2009-05-26 |
| 6530826 |
Process for the surface polishing of silicon wafers |
Guido Wenski, Heinrich Hennhofer, Bruno Lichtenegger |
2003-03-11 |
| 6095898 |
Process and device for polishing semiconductor wafers |
Heinrich Hennhofer, Hans Kramer, Helmut Kirschner, Manfred Thurner, Klaus Rottger |
2000-08-01 |
| 5980361 |
Method and device for polishing semiconductor wafers |
Paul Muller, Heinrich Hennhofer, Norbert Sickmann, Rainer Neumann, Franz Mangs +2 more |
1999-11-09 |