Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230794 | Process for cleaning, drying and hydrophilizing a semiconductor wafer | Clemens Zapilko, Thomas Buschhardt, Diego Feijoo | 2016-01-05 |
| 8685270 | Method for producing a semiconductor wafer | Juergen Schwandner, Thomas Buschhardt, Diego Feijoo, Michael Kerstan, Georg Pietsch | 2014-04-01 |
| 8580046 | Method for the treatment of a semiconductor wafer | Diego Feijoo, Thomas Buschhardt, Hans-Joachim Luthe, Franz Sollinger | 2013-11-12 |
| 8372213 | Method for the treatment of a semiconductor wafer | Diego Feijoo, Thomas Buschhardt, Hans-Joachim Luthe, Franz Sollinger | 2013-02-12 |
| 8070882 | Method for the wet-chemical treatment of a semiconductor wafer | Clemens Zapilko, Thomas Buschhardt, Diego Feijoo, Teruo Haibara, Yoshihiro Mori | 2011-12-06 |
| 7972963 | Polished semiconductor wafer and process for producing it | Thomas Teuschler, Maximilian Stadler | 2011-07-05 |
| 7938911 | Process for cleaning a semiconductor wafer using a cleaning solution | Clemens Zapilko, Thomas Buschhardt, Diego Feijoo | 2011-05-10 |
| 7538008 | Method for producing a layer structure | Diego Feijoo, Thomas Buschhardt | 2009-05-26 |