| 9230794 |
Process for cleaning, drying and hydrophilizing a semiconductor wafer |
Guenter Schwab, Clemens Zapilko, Thomas Buschhardt |
2016-01-05 |
| 8685270 |
Method for producing a semiconductor wafer |
Juergen Schwandner, Thomas Buschhardt, Michael Kerstan, Georg Pietsch, Guenter Schwab |
2014-04-01 |
| 8580046 |
Method for the treatment of a semiconductor wafer |
Guenter Schwab, Thomas Buschhardt, Hans-Joachim Luthe, Franz Sollinger |
2013-11-12 |
| 8372213 |
Method for the treatment of a semiconductor wafer |
Guenter Schwab, Thomas Buschhardt, Hans-Joachim Luthe, Franz Sollinger |
2013-02-12 |
| 8070882 |
Method for the wet-chemical treatment of a semiconductor wafer |
Guenter Schwab, Clemens Zapilko, Thomas Buschhardt, Teruo Haibara, Yoshihiro Mori |
2011-12-06 |
| 7988876 |
Method for reducing and homogenizing the thickness of a semiconductor layer which lies on the surface of an electrically insulating material |
Oliver Riemenschneider, Reinhold Wahlich |
2011-08-02 |
| 7938911 |
Process for cleaning a semiconductor wafer using a cleaning solution |
Clemens Zapilko, Thomas Buschhardt, Guenter Schwab |
2011-05-10 |
| 7829467 |
Method for producing a polished semiconductor |
Maximilian Stadler, Gunter Schwab, Karlheinz Langsdorf |
2010-11-09 |
| 7799692 |
Method and apparatus for the treatment of a semiconductor wafer |
Brian Murphy, Reinhold Wahlich |
2010-09-21 |
| 7538008 |
Method for producing a layer structure |
Guenter Schwab, Thomas Buschhardt |
2009-05-26 |