Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580046 | Method for the treatment of a semiconductor wafer | Guenter Schwab, Diego Feijoo, Thomas Buschhardt, Hans-Joachim Luthe | 2013-11-12 |
| 8372213 | Method for the treatment of a semiconductor wafer | Guenter Schwab, Diego Feijoo, Thomas Buschhardt, Hans-Joachim Luthe | 2013-02-12 |
| 6503335 | Centrifuge and method for centrifuging a semiconductor wafer | Georg-Friedrich Hohl, Roland Brunner, Susanne Bauer-Mayer, Günther Brunner, Hans-Joachim Luthe | 2003-01-07 |
| 6412500 | Device and method for cleaning semiconductor wafers | Roland Brunner, Hans-Joachim Luthe, Georg-Friedrich Hohl | 2002-07-02 |