Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503335 | Centrifuge and method for centrifuging a semiconductor wafer | Roland Brunner, Susanne Bauer-Mayer, Günther Brunner, Hans-Joachim Luthe, Franz Sollinger | 2003-01-07 |
| 6412500 | Device and method for cleaning semiconductor wafers | Roland Brunner, Franz Sollinger, Hans-Joachim Luthe | 2002-07-02 |