Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230794 | Process for cleaning, drying and hydrophilizing a semiconductor wafer | Guenter Schwab, Thomas Buschhardt, Diego Feijoo | 2016-01-05 |
| RE44986 | Method for polishing a semiconductor wafer | Thomas Jaeschke, Makoto Tabata, Klaus Roettger | 2014-07-01 |
| 8157617 | Method for polishing a semiconductor wafer | Thomas Jaeschke, Makoto Tabata, Klaus Roettger | 2012-04-17 |
| 8070882 | Method for the wet-chemical treatment of a semiconductor wafer | Guenter Schwab, Thomas Buschhardt, Diego Feijoo, Teruo Haibara, Yoshihiro Mori | 2011-12-06 |
| 7938911 | Process for cleaning a semiconductor wafer using a cleaning solution | Thomas Buschhardt, Diego Feijoo, Guenter Schwab | 2011-05-10 |