Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE44986 | Method for polishing a semiconductor wafer | Clemens Zapilko, Makoto Tabata, Klaus Roettger | 2014-07-01 |
| 8157617 | Method for polishing a semiconductor wafer | Clemens Zapilko, Makoto Tabata, Klaus Roettger | 2012-04-17 |