Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6997776 | Process for producing a semiconductor wafer | Gunther Kann, Karl-Heinz Wajand, Armin Deser, Markus Schnappauf | 2006-02-14 |
| 6095898 | Process and device for polishing semiconductor wafers | Heinrich Hennhofer, Hans Kramer, Helmut Kirschner, Thomas Buschhardt, Klaus Rottger | 2000-08-01 |
| 5980361 | Method and device for polishing semiconductor wafers | Paul Muller, Thomas Buschhardt, Heinrich Hennhofer, Norbert Sickmann, Rainer Neumann +2 more | 1999-11-09 |