Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5980361 | Method and device for polishing semiconductor wafers | Paul Muller, Thomas Buschhardt, Heinrich Hennhofer, Rainer Neumann, Franz Mangs +2 more | 1999-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5980361 | Method and device for polishing semiconductor wafers | Paul Muller, Thomas Buschhardt, Heinrich Hennhofer, Rainer Neumann, Franz Mangs +2 more | 1999-11-09 |