Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6530826 | Process for the surface polishing of silicon wafers | Guido Wenski, Thomas Buschhardt, Bruno Lichtenegger | 2003-03-11 |
| 6095898 | Process and device for polishing semiconductor wafers | Hans Kramer, Helmut Kirschner, Manfred Thurner, Thomas Buschhardt, Klaus Rottger | 2000-08-01 |
| 5980361 | Method and device for polishing semiconductor wafers | Paul Muller, Thomas Buschhardt, Norbert Sickmann, Rainer Neumann, Franz Mangs +2 more | 1999-11-09 |