Issued Patents All Time
Showing 26–50 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7153785 | Method of producing annealed wafer and annealed wafer | Masaro Tamatsuka, Takatoshi Nagoya, Wei Qu | 2006-12-26 |
| 7147711 | Method of producing silicon wafer and silicon wafer | Masaro Tamatsuka, Wei Qu | 2006-12-12 |
| 7081422 | Manufacturing process for annealed wafer and annealed wafer | Yoshinori Hayamizu, Satoshi Tobe | 2006-07-25 |
| 7011717 | Method for heat treatment of silicon wafers and silicon wafer | Shoji Akiyama, Yuuichi Matsumoto, Masaro Tamatsuka | 2006-03-14 |
| 6878645 | Method for manufacturing silicon wafer | Shoji Akiyama, Masaro Tamatsuka, Masaru Shinomiya, Yuichi Matsumoto | 2005-04-12 |
| 6844209 | Semiconductor device having a matrix array of contacts and a fabrication process thereof | Naoto Yamada | 2005-01-18 |
| 6841450 | Annealed wafer manufacturing method and annealed wafer | Masaro Tamatsuka, Takatoshi Nagoya, Wei Qu, Makoto Iida | 2005-01-11 |
| 6809015 | Method for heat treatment of silicon wafers and silicon wafer | Shoji Akiyama, Yuuichi Matsumoto, Masaro Tamatsuka | 2004-10-26 |
| 6805743 | Method for manufacturing single-crystal-silicon wafers | Masaro Tamatsuka, Takatoshi Nagoya | 2004-10-19 |
| 6806199 | Method for manufacturing silicon mirror wafer, silicon mirror wafer, and heat treatment furnace | Shoji Akiyama | 2004-10-19 |
| 6670261 | Production method for annealed wafer | Shoji Akiyama, Masaro Tamatsuka, Takatoshi Nagoya | 2003-12-30 |
| 6573159 | Method for thermally annealing silicon wafer and silicon wafer | Shoji Akiyama, Yuuichi Matsumoto, Masaro Tamatsuka | 2003-06-03 |
| 6551398 | Heat treatment method for a silicon monocrystal wafer and a silicon monocrystal wafer | Takao Abe, Masahiro Kato | 2003-04-22 |
| 6548907 | Semiconductor device having a matrix array of contacts and a fabrication process thereof | Naoto Yamada | 2003-04-15 |
| 6544899 | Process for manufacturing silicon epitaxial wafer | Hiroshi Takeno | 2003-04-08 |
| 6538285 | Silicon wafer | Shoji Akiyama, Takao Abe | 2003-03-25 |
| 6531416 | Method for heat treatment of silicon wafer and silicon wafer heat-treated by the method | Toshihiko Miyano, Satoshi Oka | 2003-03-11 |
| 6461939 | SOI wafers and methods for producing SOI wafer | Jun-ichiro Furihata, Kiyoshi Mitani, Shoji Akiyama | 2002-10-08 |
| 6413310 | Method for producing silicon single crystal wafer and silicon single crystal wafer | Masaro Tamatsuka, Shoji Akiyama, Masaru Shinomiya | 2002-07-02 |
| 6403502 | Heat treatment method for a silicon wafer and a silicon wafer heat-treated by the method | Satoshi Oka, Takao Abe | 2002-06-11 |
| 6391796 | Method for heat-treating silicon wafer and silicon wafer | Shoji Akiyama | 2002-05-21 |
| 6362076 | Method of fabricating an SOI wafer by hydrogen ion delamination without independent bonding heat treatment | Yukio Inazuki, Hiroji Aga, Kiyoshi Mitani | 2002-03-26 |
| 6333279 | Method for producing silicon wafer and silicon wafer | Shoji Akiyama, Takao Abe | 2001-12-25 |
| 6245311 | Method for heat treatment of silicon wafer and silicon wafer | Shoji Akiyama, Toshihiko Miyano | 2001-06-12 |
| 6238990 | Method for heat treatment of SOI wafer and SOI wafer heat-treated by the method | Hiroji Aga, Kiyoshi Mitani | 2001-05-29 |