Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266520 | Method for manufacturing epitaxial wafer, silicon-based substrate for epitaxial growth, and epitaxial wafer | Keitarou Tsuchiya, Kazunori HAGIMOTO | 2025-04-01 |
| 10833184 | Semiconductor device substrate, semiconductor device, and method for manufacturing semiconductor device substrate | Ken Sato, Hiroshi Shikauchi, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2020-11-10 |
| 10586701 | Semiconductor base having a composition graded buffer layer stack | Hiroshi Shikauchi, Ken Sato, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2020-03-10 |
| 10553674 | Substrate for semiconductor device, semiconductor device, and method for manufacturing semiconductor device | Ken Sato, Hiroshi Shikauchi, Hirokazu Goto, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2020-02-04 |
| 10529842 | Semiconductor base substance having a boron containing buffer layer, semiconductor device including the same, and methods for manufacturing the semiconductor base substance and the semiconductor device | Hiroshi Shikauchi, Ken Sato, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2020-01-07 |
| 10319587 | Method of manufacturing epitaxial wafer and silicon-based substrate for epitaxial growth | Kazunori HAGIMOTO, Keitaro TSUCHIYA, Hirokazu Goto, Ken Sato, Hiroshi Shikauchi +2 more | 2019-06-11 |
| 10115589 | Epitaxial substrate for electronic devices, electronic device, method for producing the epitaxial substrate for electronic devices, and method for producing the electronic device | Kazunori HAGIMOTO, Keitaro TSUCHIYA, Hirokazu Goto, Ken Sato, Hiroshi Shikauchi | 2018-10-30 |
| 10068985 | Method for manufacturing semiconductor substrate, method for manufacturing semiconductor device, semiconductor substrate, and semiconductor device | Ken Sato, Hiroshi Shikauchi, Hirokazu Goto, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2018-09-04 |
| 9966259 | Silicon-based substrate, semiconductor device, and method for manufacturing semiconductor device | Hiroshi Shikauchi, Ken Sato, Hirokazu Goto, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2018-05-08 |
| 9938638 | Method for producing semiconductor epitaxial wafer and semiconductor epitaxial wafer | Kazunori HAGIMOTO, Keitaro TSUCHIYA, Hirokazu Goto, Ken Sato, Hiroshi Shikauchi +2 more | 2018-04-10 |
| 9876101 | Semiconductor substrate and semiconductor device | Ken Sato, Hiroshi Shikauchi, Hirokazu Goto, Kazunori HAGIMOTO, Keitaro TSUCHIYA | 2018-01-23 |
| 9673052 | Silicon-based substrate having first and second portions | Hiroshi Shikauchi, Ken Sato, Hirokazu Goto, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2017-06-06 |
| 9520286 | Semiconductor substrate, semiconductor device and method of manufacturing the semiconductor device | Hiroshi Shikauchi, Ken Sato, Hirokazu Goto, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2016-12-13 |
| 9401420 | Semiconductor device | Hiroshi Shikauchi, Ken Sato, Hirokazu Goto, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2016-07-26 |
| 9281187 | Method for manufacturing nitride semiconductor device | Ken Sato, Hirokazu Goto, Hiroshi Shikauchi, Keitaro TSUCHIYA, Kazunori HAGIMOTO | 2016-03-08 |
| 6878645 | Method for manufacturing silicon wafer | Norihiro Kobayashi, Shoji Akiyama, Masaro Tamatsuka, Yuichi Matsumoto | 2005-04-12 |
| 6413310 | Method for producing silicon single crystal wafer and silicon single crystal wafer | Masaro Tamatsuka, Norihiro Kobayashi, Shoji Akiyama | 2002-07-02 |
| 5171708 | Method of boron diffusion into semiconductor wafers having reduced stacking faults | Masatake Katayama, Shoichi Fujiya, Isao Moroga | 1992-12-15 |