Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5696034 | Method for producing semiconductor substrate | Masatake Katayama, Isao Shirai, Youichi Kumaki, Akio Kasahara | 1997-12-09 |
| 5393370 | Method of making a SOI film having a more uniform thickness in a SOI substrate | Yutaka Ohta, Masatake Katayama | 1995-02-28 |
| 5171708 | Method of boron diffusion into semiconductor wafers having reduced stacking faults | Masatake Katayama, Shoichi Fujiya, Masaru Shinomiya | 1992-12-15 |