Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6531416 | Method for heat treatment of silicon wafer and silicon wafer heat-treated by the method | Norihiro Kobayashi, Satoshi Oka | 2003-03-11 |
| 6245311 | Method for heat treatment of silicon wafer and silicon wafer | Norihiro Kobayashi, Shoji Akiyama | 2001-06-12 |