Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6204188 | Heat treatment method for a silicon wafer and a silicon wafer heat-treated by the method | Takao Abe | 2001-03-20 |
| 6191009 | Method for producing silicon single crystal wafer and silicon single crystal wafer | Masaro Tamatsuka, Makoto Iida | 2001-02-20 |
| 6139625 | Method for producing a silicon single crystal wafer and a silicon single crystal wafer | Masaro Tamatsuka, Satoshi Oka | 2000-10-31 |
| 5998283 | Silicon wafer having plasma CVD gettering layer with components/composition changing in depth-wise direction and method of manufacturing the silicon wafer | Shoichi Takamizawa | 1999-12-07 |
| 5993493 | Method of manufacturing mirror-polished silicon wafers, and apparatus for processing silicon wafers | Shoichi Takamizawa | 1999-11-30 |
| 5970365 | Silicon wafer including amorphous silicon layer formed by PCVD and method of manufacturing wafer | Shoichi Takamizawa | 1999-10-19 |
| 5863659 | Silicon wafer, and method of manufacturing the same | Katsunori Koarai | 1999-01-26 |
| 5759426 | Heat treatment jig for semiconductor wafers and a method for treating a surface of the same | Kazuo Mamada, Yuichi Matsumoto, Satoshi Oka, Masatake Katayama | 1998-06-02 |