Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9127376 | Method for manufacturing nitride semiconductor self-supporting substrate and nitride semiconductor self-supporting substrate | Masataka Watanabe | 2015-09-08 |
| 7214271 | Silicon single crystal wafer process apparatus, silicon single crystal wafer, and manufacturing method of silicon epitaxial wafer | Ryuji Kono | 2007-05-08 |
| 5998283 | Silicon wafer having plasma CVD gettering layer with components/composition changing in depth-wise direction and method of manufacturing the silicon wafer | Norihiro Kobayashi | 1999-12-07 |
| 5993493 | Method of manufacturing mirror-polished silicon wafers, and apparatus for processing silicon wafers | Norihiro Kobayashi | 1999-11-30 |
| 5970365 | Silicon wafer including amorphous silicon layer formed by PCVD and method of manufacturing wafer | Norihiro Kobayashi | 1999-10-19 |
| 5899744 | Method of manufacturing semiconductor wafers | Kohei Toyama, Kaneyoshi Aramaki | 1999-05-04 |