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Connection device and test system |
Susumu Kasukabe, Terutaka Mori, Akihiko Ariga, Hidetaka Shigi, Takayoshi Watanabe |
2009-06-02 |
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Connection device and test system |
Susumu Kasukabe, Terutaka Mori, Akihiko Ariga, Hidetaka Shigi, Takayoshi Watanabe |
2007-10-23 |
| 7214271 |
Silicon single crystal wafer process apparatus, silicon single crystal wafer, and manufacturing method of silicon epitaxial wafer |
Shoichi Takamizawa |
2007-05-08 |
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Method of manufacturing semiconductor apparatus |
Makoto Kitano, Hideo Miura, Hiroyuki Ota, Yoshishige Endo, Takeshi Harada +5 more |
2006-10-10 |
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Connection device and test system |
Susumu Kasukabe, Terutaka Mori, Akihiko Ariga, Hidetaka Shigi, Takayoshi Watanabe |
2004-07-06 |
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Silicon wafer for epitaxial wafer, epitaxial wafer, and method of manufacture thereof |
Akihiro Kimura, Hideki Sato, Masahiro Kato, Masaro Tamatsuka |
2003-09-30 |
| 6573112 |
Semiconductor device manufacturing method |
Akihiko Ariga, Hideyuki Aoki, Hiroyuki Ohta, Yoshishige Endo, Masatoshi Kanamaru +4 more |
2003-06-03 |
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Process for manufacturing semiconductor device |
Makoto Kitano, Hideo Miura, Hiroyuki Ota, Yoshishige Endo, Takeshi Harada +5 more |
2003-01-28 |
| 6479305 |
Semiconductor device manufacturing method |
Akihiko Ariga, Hideyuki Aoki, Hiroyuki Ohta, Yoshishige Endo, Masatoshi Kanamaru +4 more |
2002-11-12 |
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Connector and probing system |
Susumu Kasukabe, Terutaka Mori, Akihiko Ariga, Hidetaka Shigi, Takayoshi Watanabe |
2001-10-23 |