Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10989731 | Physical quantity sensor | Daisuke Maeda, Masahide Hayashi, Masashi Yura, Akihiro Okamoto | 2021-04-27 |
| 9890037 | Physical quantity sensor | Masahide Hayashi, Masashi Yura, Heewon Jeong | 2018-02-13 |
| 9651408 | Structure of physical sensor | Takanori Aono, Masahide Hayashi, Heewon Jeong | 2017-05-16 |
| 9249011 | Process for fabricating MEMS device | Takanori Aono, Kengo Suzuki | 2016-02-02 |
| 8143588 | Deflector array, exposure apparatus, and device manufacturing method | Kenichi Nagae | 2012-03-27 |
| 7795597 | Deflector array, exposure apparatus, and device manufacturing method | Kenichi Nagae | 2010-09-14 |
| 7505646 | Optical switch and optical switch array | Yukio Katou, Masaya Horino, Yasuhiro Hamaguchi, Hiroyuki Nagatomo | 2009-03-17 |
| 7457206 | Optical head, optical information storage apparatus, and their fabrication method | Takeshi Shimano, Masaya Horino | 2008-11-25 |
| 7119362 | Method of manufacturing semiconductor apparatus | Ryuji Kono, Makoto Kitano, Hideo Miura, Hiroyuki Ota, Yoshishige Endo +5 more | 2006-10-10 |
| 7018857 | Method of manufacturing a semiconductor device including defect inspection using a semiconductor testing probe | Takanori Aono, Tatsuya Nagata, Kenji Kawakami, Hideyuki Aoki | 2006-03-28 |
| 6955870 | Method of manufacturing a semiconductor device | Ryuji Kohno, Hideo Miura, Hiroya Shimizu, Hideyuki Aoki | 2005-10-18 |
| 6952110 | Testing apparatus for carrying out inspection of a semiconductor device | Ryuji Kohno, Hideo Miura, Hiroya Shimizu, Hideyuki Aoki | 2005-10-04 |
| 6864568 | Packaging device for holding a plurality of semiconductor devices to be inspected | Ryuji Kohno, Hiroya Shimizu, Atsushi Hosogane, Toshio Miyatake, Hideo Miura +4 more | 2005-03-08 |
| 6864695 | Semiconductor device testing apparatus and semiconductor device manufacturing method using it | Ryuji Kohno, Hideo Miura, Hiroya Shimizu, Naoto Ban | 2005-03-08 |
| 6828810 | Semiconductor device testing apparatus and method for manufacturing the same | Yoshishige Endo, Takanori Aono, Ryuji Kohno, Hiroya Shimizu, Naoto Ban +1 more | 2004-12-07 |
| 6774654 | Semiconductor-device inspecting apparatus and a method for manufacturing the same | Yoshishige Endo, Takanorr Aono, Ryuji Kohno, Toshio Miyatake, Hideyuki Aoki +1 more | 2004-08-10 |
| 6714030 | Semiconductor inspection apparatus | Ryuji Kohno, Hideo Miura, Yoshishige Endo, Atsushi Hosogane, Hideyuki Aoki +1 more | 2004-03-30 |
| 6660541 | Semiconductor device and a manufacturing method thereof | Yoshishige Endo, Takanori Aono, Ryuji Kohno, Hideyuki Aoki | 2003-12-09 |
| 6573112 | Semiconductor device manufacturing method | Ryuji Kono, Akihiko Ariga, Hideyuki Aoki, Hiroyuki Ohta, Yoshishige Endo +4 more | 2003-06-03 |
| 6566149 | Method for manufacturing substrate for inspecting semiconductor device | Atsushi Hosogane, Yoshihige Endou, Ryuji Kouno, Hideo Miura, Shinji Tanaka +4 more | 2003-05-20 |
| 6548315 | Manufacture method for semiconductor inspection apparatus | Ryuji Kohno, Hideo Miura, Yoshishige Endo, Atsushi Hosogane, Hideyuki Aoki +1 more | 2003-04-15 |
| 6531327 | Method for manufacturing semiconductor device utilizing semiconductor testing equipment | Yoshishige Endo, Atsushi Hosogane, Tatsuya Nagata, Ryuji Kohno, Hideyuki Aoki +1 more | 2003-03-11 |
| 6511857 | Process for manufacturing semiconductor device | Ryuji Kono, Makoto Kitano, Hideo Miura, Hiroyuki Ota, Yoshishige Endo +5 more | 2003-01-28 |
| 6507204 | Semiconductor testing equipment with probe formed on a cantilever of a substrate | Yoshishige Endo, Atsushi Hosogane, Tatsuya Nagata, Ryuji Kohno, Hideyuki Aoki +1 more | 2003-01-14 |
| 6496023 | Semiconductor-device inspecting apparatus and a method for manufacturing the same | Yoshishige Endo, Takanorr Aono, Ryuji Kohno, Toshio Miyatake, Hideyuki Aoki +1 more | 2002-12-17 |