| 10989731 |
Physical quantity sensor |
Daisuke Maeda, Masahide Hayashi, Masashi Yura, Akihiro Okamoto |
2021-04-27 |
|
| 9890037 |
Physical quantity sensor |
Masahide Hayashi, Masashi Yura, Heewon Jeong |
2018-02-13 |
|
| 9651408 |
Structure of physical sensor |
Takanori Aono, Masahide Hayashi, Heewon Jeong |
2017-05-16 |
|
| 9249011 |
Process for fabricating MEMS device |
Takanori Aono, Kengo Suzuki |
2016-02-02 |
|
| 8143588 |
Deflector array, exposure apparatus, and device manufacturing method |
Kenichi Nagae |
2012-03-27 |
|
| 7795597 |
Deflector array, exposure apparatus, and device manufacturing method |
Kenichi Nagae |
2010-09-14 |
|
| 7505646 |
Optical switch and optical switch array |
Yukio Katou, Masaya Horino, Yasuhiro Hamaguchi, Hiroyuki Nagatomo |
2009-03-17 |
$87,000 |
| 7457206 |
Optical head, optical information storage apparatus, and their fabrication method |
Takeshi Shimano, Masaya Horino |
2008-11-25 |
$92,000 |
| 7119362 |
Method of manufacturing semiconductor apparatus |
Ryuji Kono, Makoto Kitano, Hideo Miura, Hiroyuki Ota, Yoshishige Endo +5 more |
2006-10-10 |
$99,000 |
| 7018857 |
Method of manufacturing a semiconductor device including defect inspection using a semiconductor testing probe |
Takanori Aono, Tatsuya Nagata, Kenji Kawakami, Hideyuki Aoki |
2006-03-28 |
$141,000 |
| 6955870 |
Method of manufacturing a semiconductor device |
Ryuji Kohno, Hideo Miura, Hiroya Shimizu, Hideyuki Aoki |
2005-10-18 |
$163,000 |
| 6952110 |
Testing apparatus for carrying out inspection of a semiconductor device |
Ryuji Kohno, Hideo Miura, Hiroya Shimizu, Hideyuki Aoki |
2005-10-04 |
$185,000 |
| 6864568 |
Packaging device for holding a plurality of semiconductor devices to be inspected |
Ryuji Kohno, Hiroya Shimizu, Atsushi Hosogane, Toshio Miyatake, Hideo Miura +4 more |
2005-03-08 |
$131,000 |
| 6864695 |
Semiconductor device testing apparatus and semiconductor device manufacturing method using it |
Ryuji Kohno, Hideo Miura, Hiroya Shimizu, Naoto Ban |
2005-03-08 |
$131,000 |
| 6828810 |
Semiconductor device testing apparatus and method for manufacturing the same |
Yoshishige Endo, Takanori Aono, Ryuji Kohno, Hiroya Shimizu, Naoto Ban +1 more |
2004-12-07 |
|
| 6774654 |
Semiconductor-device inspecting apparatus and a method for manufacturing the same |
Yoshishige Endo, Takanorr Aono, Ryuji Kohno, Toshio Miyatake, Hideyuki Aoki +1 more |
2004-08-10 |
|
| 6714030 |
Semiconductor inspection apparatus |
Ryuji Kohno, Hideo Miura, Yoshishige Endo, Atsushi Hosogane, Hideyuki Aoki +1 more |
2004-03-30 |
$280,000 |
| 6660541 |
Semiconductor device and a manufacturing method thereof |
Yoshishige Endo, Takanori Aono, Ryuji Kohno, Hideyuki Aoki |
2003-12-09 |
$174,000 |
| 6573112 |
Semiconductor device manufacturing method |
Ryuji Kono, Akihiko Ariga, Hideyuki Aoki, Hiroyuki Ohta, Yoshishige Endo +4 more |
2003-06-03 |
$147,000 |
| 6566149 |
Method for manufacturing substrate for inspecting semiconductor device |
Atsushi Hosogane, Yoshihige Endou, Ryuji Kouno, Hideo Miura, Shinji Tanaka +4 more |
2003-05-20 |
$125,000 |
| 6548315 |
Manufacture method for semiconductor inspection apparatus |
Ryuji Kohno, Hideo Miura, Yoshishige Endo, Atsushi Hosogane, Hideyuki Aoki +1 more |
2003-04-15 |
$98,000 |
| 6531327 |
Method for manufacturing semiconductor device utilizing semiconductor testing equipment |
Yoshishige Endo, Atsushi Hosogane, Tatsuya Nagata, Ryuji Kohno, Hideyuki Aoki +1 more |
2003-03-11 |
$162,000 |
| 6511857 |
Process for manufacturing semiconductor device |
Ryuji Kono, Makoto Kitano, Hideo Miura, Hiroyuki Ota, Yoshishige Endo +5 more |
2003-01-28 |
$136,000 |
| 6507204 |
Semiconductor testing equipment with probe formed on a cantilever of a substrate |
Yoshishige Endo, Atsushi Hosogane, Tatsuya Nagata, Ryuji Kohno, Hideyuki Aoki +1 more |
2003-01-14 |
$192,000 |
| 6496023 |
Semiconductor-device inspecting apparatus and a method for manufacturing the same |
Yoshishige Endo, Takanorr Aono, Ryuji Kohno, Toshio Miyatake, Hideyuki Aoki +1 more |
2002-12-17 |
$92,000 |
