Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6210147 | Method of and apparatus for shaping fibrous elastic body | Takayasu Mori, Masanao Yamaguchi | 2001-04-03 |
| 6159541 | Spin coating process | Mitsuhiro Sakai, Hideyuki Takamori | 2000-12-12 |
| 5965200 | Processing apparatus and processing method | Kiyohisa Tateyama, Takayuki Tomoeda | 1999-10-12 |
| 5871584 | Processing apparatus and processing method | Kiyohisa Tateyama, Takayuki Tomoeda | 1999-02-16 |
| 5815762 | Processing apparatus and processing method | Mitsuhiro Sakai, Kazuaki Tsunoda | 1998-09-29 |
| 5681614 | Hydrophobic treatment method involving delivery of a liquid process agent to a process space | Tsutae Omori, Kouji Harada, Takami Satoh, Noriyuki Anai | 1997-10-28 |
| 5505781 | Hydrophobic processing apparatus including a liquid delivery system | Tsutae Omori, Kouji Harada, Takami Satoh, Noriyuki Anai | 1996-04-09 |
| 5445699 | Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surface | Yuuji Kamikawa, Kimiharu Matsumura, Junichi Nagata | 1995-08-29 |
| 5249142 | Indirect temperature-measurement of films formed on semiconductor wafers | Eiichi Shirakawa, Kimiharu Matsumura | 1993-09-28 |