Issued Patents All Time
Showing 76–91 of 91 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6093085 | Apparatuses and methods for polishing semiconductor wafers | Bradley J. Yellitz | 2000-07-25 |
| 6056631 | Chemical mechanical polish platen and method of use | Thomas M. Brown | 2000-05-02 |
| 6057068 | Method for determining the efficiency of a planarization process | Christopher H. Raeder, Thomas M. Brown | 2000-05-02 |
| 6051495 | Seasoning of a semiconductor wafer polishing pad to polish tungsten | Kevin Shipley, Peter J. Beckage | 2000-04-18 |
| 6000281 | Method and apparatus for measuring critical dimensions on a semiconductor surface | — | 1999-12-14 |
| 5966766 | Apparatus and method for cleaning semiconductor wafer | Kevin Shipley | 1999-10-19 |
| 5934978 | Methods of making and using a chemical-mechanical polishing slurry that reduces wafer defects | Peter J. Beckage | 1999-08-10 |
| 5932328 | Coating composition for hard surfaces | Kenneth Flanagan, Abul Mansur | 1999-08-03 |
| 5916855 | Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films | Steven C. Avanzino, Christy Mei-Chu Woo, Diana M. Schonauer | 1999-06-29 |
| 5782962 | Cleaning and polishing composition | Kenneth Flanagan, Abul Mansur | 1998-07-21 |
| 5753607 | Cleaning and polishing composition | Kenneth Flanagan, Abul Mansur | 1998-05-19 |
| 5645469 | Polishing pad with radially extending tapered channels | Bradley J. Yellitz | 1997-07-08 |
| 5510652 | Polishstop planarization structure | Michael A. Leach | 1996-04-23 |
| 5492594 | Chemical-mechanical polishing tool with end point measurement station | Eric H. Freeman, Gilbert H. Ross | 1996-02-20 |
| 5356513 | Polishstop planarization method and structure | Michael A. Leach | 1994-10-18 |
| 5268330 | Process for improving sheet resistance of an integrated circuit device gate | John H. Givens, James S. Nakos, Craig M. Hill, Chung H. Lam | 1993-12-07 |