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2003-03-11 |
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Retaining ring for wafer polishing |
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Method and structure for polishing a wafer during manufacture of integrated circuits |
— |
1998-11-17 |
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Refractory metal-titanium nitride conductive structures |
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1998-06-02 |
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Polishing a workpiece using equal velocity at all points overlapping a polisher |
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1998-03-31 |
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Block for polishing a wafer during manufacture of integrated circuits |
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1997-12-30 |
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Method and structure for polishing a wafer during manufacture of integrated circuits |
— |
1997-03-04 |
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Polishstop planarization structure |
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1996-04-23 |
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Device for detecting an end point in polishing operations |
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Device and method for detecting an end point in polishing operation |
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1992-08-04 |
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Wafer flood polishing |
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Process for defining organic sidewall structures |
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VLSI coaxial wiring structure |
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