Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6722942 | Chemical mechanical polishing with electrochemical control | Christopher H. Lansford, Jeremy Lansford | 2004-04-20 |
| 6093085 | Apparatuses and methods for polishing semiconductor wafers | Peter A. Burke | 2000-07-25 |
| 5645469 | Polishing pad with radially extending tapered channels | Peter A. Burke | 1997-07-08 |