Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6722962 | Polishing system, polishing method, polishing pad, and method of forming polishing pad | Shuzo Sato, Hiizu Ohtorii, Yasuharu Ohkawa, Yutaka Ozawa | 2004-04-20 |
| 6520835 | Polishing system, polishing method, polishing pad, and method of forming polishing pad | Shuzo Sato, Hiizu Ohtorii, Yasuharu Ohkawa, Yutaka Ozawa | 2003-02-18 |
| 6139400 | Polishing system and method with polishing pad pressure adjustment | Shuzo Sato, Hiizu Ohtorii, Yasuharu Ohkawa, Yutaka Ozawa | 2000-10-31 |