Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906899 | Mask defect repair apparatus and mask defect repair method | Mitsuto Aso, Katsumi Suzuki, Mamoru Okabe, Masakatsu Hasuda | 2024-02-20 |
| 11721517 | Focused ion beam processing apparatus | Hiroshi Oba, Yasuhiko Sugiyama, Koji Nagahara | 2023-08-08 |
| 9820370 | Heat transfer system for an inductively coupled plasma device | Yutaka Ikku | 2017-11-14 |
| 9726611 | Stabilized ICP emission spectrometer and method of using | — | 2017-08-08 |
| 8274063 | Composite focused ion beam device, process observation method using the same, and processing method | Takashi Kaito, Junichi Tashiro, Yasuhiko Sugiyama, Toshiaki Fujii, Kazuo Aita +1 more | 2012-09-25 |
| 7755065 | Focused ion beam apparatus | Kenichi Nishinaka | 2010-07-13 |
| 6031379 | Plasma ion mass analyzing apparatus | Shinichi Takada | 2000-02-29 |
| 6002129 | Inductively coupled plasma mass spectrometric and spectrochemical analyzer | Tetsumasa Ito, Osamu Matsuzawa | 1999-12-14 |
| 5867262 | Sample introducing device for inductively coupled plasma analyzer | Toru Etoh | 1999-02-02 |
| 5804821 | Plasma ion source mass analyzer | — | 1998-09-08 |
| 5773823 | Plasma ion source mass spectrometer | Tetsumasa Ito | 1998-06-30 |
| 5559337 | Plasma ion source mass analyzing apparatus | Tetsumasa Ito | 1996-09-24 |
| 5477048 | Inductively coupled plasma mass spectrometer | Tetsumasa Ito, Toru Eto | 1995-12-19 |
| 5426299 | Inductive plasma mass spectrometer | Tetsumasa Itoh | 1995-06-20 |
| 5334834 | Inductively coupled plasma mass spectrometry device | Tetsumasa Ito | 1994-08-02 |
| 5071671 | Process for forming pattern films | Takashi Kaito, Hisao Houjyo, Masahiro Yamamoto | 1991-12-10 |
| 4999492 | Inductively coupled plasma mass spectrometry apparatus | — | 1991-03-12 |
| 4930439 | Mask-repairing device | Mitsuyoshi Sato, Takashi Kaito | 1990-06-05 |
| 4902530 | Method of correcting a pattern film | Anto Yasaka, Mitsuyoshi Sato | 1990-02-20 |
| 4874460 | Method and apparatus for modifying patterned film | Takehiro Yamaoka | 1989-10-17 |
| 4874632 | Process for forming pattern film | Takashi Kaito, Hisao Houjyo, Masahiro Yamamoto | 1989-10-17 |
| 4851097 | Apparatus for repairing a pattern film | Osamu Hattori, Anton Yasaka, Mitsuyoshi Sato, Sumio Sasaki | 1989-07-25 |