Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721517 | Focused ion beam processing apparatus | Hiroshi Oba, Yoshitomo Nakagawa, Koji Nagahara | 2023-08-08 |
| 11276555 | Charged particle beam apparatus, composite charged particle beam apparatus, and control method for charged particle beam apparatus | Koji Nagahara | 2022-03-15 |
| 11257655 | Focused ion beam apparatus, and control method for focused ion beam apparatus | Naoko Hirose | 2022-02-22 |
| 11017988 | Charged particle beam apparatus | Hiroshi Oba, Yasutaka Otsuka | 2021-05-25 |
| 11017982 | Composite charged particle beam apparatus and control method thereof | Naoko Hirose, Hiroshi Oba | 2021-05-25 |
| 10176964 | Focused ion beam apparatus | Hiroshi Oba | 2019-01-08 |
| 10056232 | Charged particle beam apparatus and plasma ignition method | Hiroshi Oba | 2018-08-21 |
| 9793085 | Focused ion beam apparatus | Anto Yasaka, Tomokazu Kozakai, Osamu Matsuda, Kazuo Aita, Fumio Aramaki +1 more | 2017-10-17 |
| 9773646 | Plasma ion source and charged particle beam apparatus | Hiroshi Oba, Mamoru Okabe | 2017-09-26 |
| 9773634 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Osamu Matsuda, Kazuo Aita, Fumio Aramaki, Anto Yasaka +1 more | 2017-09-26 |
| 9773637 | Plasma ion source and charged particle beam apparatus | Hiroshi Oba, Mamoru Okabe | 2017-09-26 |
| 9640361 | Emitter structure, gas ion source and focused ion beam system | Anto Yasaka, Hiroshi Oba | 2017-05-02 |
| 9583299 | Iridium tip, gas field ion source, focused ion beam apparatus, electron source, electron microscope, electron beam applied analysis apparatus, ion-electron multi-beam apparatus, scanning probe microscope, and mask repair apparatus | Tomokazu Kozakai, Osamu Matsuda, Kazuo Aita, Fumio Aramaki, Anto Yasaka +1 more | 2017-02-28 |
| 9418817 | Focused ion beam apparatus and control method thereof | Fumio Aramaki, Hiroshi Oba | 2016-08-16 |
| 9378858 | Repair apparatus | Fumio Aramaki, Anto Yasaka, Osamu Matsuda, Hiroshi Oba, Tomokazu Kozakai +1 more | 2016-06-28 |
| 9336979 | Focused ion beam apparatus with precious metal emitter surface | Anto Yasaka, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda | 2016-05-10 |
| 9245712 | Focused ion beam system | Tomokazu Kozakai, Osamu Matsuda | 2016-01-26 |
| 9129771 | Emitter structure, gas ion source and focused ion beam system | Anto Yasaka, Hiroshi Oba | 2015-09-08 |
| 9111717 | Ion beam apparatus | Tatsuya Asahata, Hiroshi Oba | 2015-08-18 |
| 8999178 | Method for fabricating emitter | Kazuo Aita, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka | 2015-04-07 |
| 8963100 | Nitrogen ions from a gas field ion source held at a pressure of 1.0 x 10^(-6) pa to 1.0 x 10^(-2) pa | Anto Yasaka, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda | 2015-02-24 |
| 8822911 | Focused ion beam apparatus and method of adjusting ion beam optics | Tatsuya Asahata, Toshio Doi, Hiroshi Oba | 2014-09-02 |
| 8764994 | Method for fabricating emitter | Kazuo Aita, Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Anto Yasaka | 2014-07-01 |
| 8274063 | Composite focused ion beam device, process observation method using the same, and processing method | Takashi Kaito, Yoshitomo Nakagawa, Junichi Tashiro, Toshiaki Fujii, Kazuo Aita +1 more | 2012-09-25 |
| 8269194 | Composite focused ion beam device, and processing observation method and processing method using the same | Takashi Kaito, Junichi Tashiro, Kouji Iwasaki, Toshiaki Fujii, Kazuo Aita +1 more | 2012-09-18 |